Rf mems switches and integrated switching circuits pdf files

An ultralow voltage microelectromechanical system mems switch for lowpower integrated circuit ic applications is proposed, fabricated and demonstrated. Switchable microwave circuits using the eads lowcomplexity. These usbethernet rf switches are light, compact and greatly simplify setting up complex switching sequences. Simulation of constantcharge biasing integrated circuit. Courtesy of radant mems highfrequency switching functions have also been implemented with mems technology, which combines many of the benefits of solidstate and electromechanical approaches. Rf mems switches and integrated switching circuits ai. Keywords switches, but further allows the use of metal materials with sub rf mems, quality factor, micromechanical circuit, rf front end. Over 10 million scientific documents at your fingertips. As an example of rf devices, a capacitive mems switch for millimeterwave has been proposed. Radiofrequency microelectromechanical system wikipedia. The realized chips include the highvoltage hv generation and switching units integrated together with the rf mems switches. Rf mems switches, and rf mems router circuits produced in the name project. Both series and shunt mems switches have been considered. Introduction to rf mems switch working and its applications.

Rfmems switches designed for highperformance uniplanar. Zerostatic power radiofrequency switches based on mos 2. Rf mems switches are used in a dualband 68 ghz amplifier for lowmedium power applications 1416 dbm. Muldavin, rf mems switches and switch circuits, ieee microwave magazine, dec.

This paper is an extension our previous work toward the integration of the constantcharge biasing circuit in monolithic integrated circuits using conventional mos foundry service. Analog devices rf mems switches offer excellent reliability with superior precision and rf performance from 0 hz dc to 14 ghz. Rf mems switches and integrated switching circuits springerlink. Adi is the first to propose two versions of its rf mems switch technology in the mass market, the adgm4 and the 1004. A circuits from the lab reference designs from analog devices have been designed and built by analog devices engineers. The folded hinge structure allows a large beam structure to be suspended with a designed air gap, effectively suppressing unwanted deflection. Rfmems switches for reconfigurable integrated circuits abstract. A capacitive rf mems shunt switch shinji kobayashi, hiroshi kawai murata manufacturing co. Maciel radant mems, incorporated, stow, ma, 01775, usa abstract an electrostatically actuated broadband ohmic microswitch has been developed that has applications from dc through the microwave region. Rf mems mems devices capable of reconfiguring the rf characteristics of a device. Ultrareliable mechanical switches capable of extended life up to 10million switch cycles. Insidepenton com electronic design adobe pdf logo tiny. Rf mems switches and integrated switching circuits aiqun liu. The rf mems switches, especially those with wide cantilever designs, use small diameter holes 210 m in the beam to speed up the release etch while allowing easier sacrificial layer removal.

Ultralow voltage mems switch using a folded hinge structure. It is also presented a technique for modeling and design of inductivelytuned mems shunt switch. Rf mems provides a class of new devices and components which display superior highfrequency. Rf mems circuit design for wireless communications. It presents rf mems capacitive switches and mems tunable filter first ever to be produced in. Mems, fet and pin rf switching devices and circuits for.

Usb, ethernet, and spi control interfaces available. Rf microtech provides custom design and testing for rf mems switches and tunable components from dc up. This paper presents for the first time a novel concept of a microelectromechanical systems mems waveguide switch based on a reconfigurable surface, whose working principle is to block the wave propagation by shortcircuiting the electrical field lines of the te10 mode of a wr12 rectangular waveguide. May 23, 2014 the rf mems switches are frequently used in microwave and radio frequency communication devices, such as transmitters and receivers, mode selection switch, antenna switch, etc. International journal of microwave and wireless technologies, 2011. Rf mems mary kay party invite pdf switches for reconfigurable. The rf mems switch model, available in the comsol model gallery, shows how to simulate and analyze the contact forces and capacitance changes that occur during operation of the switch. Lets take a look at how you can use comsol multiphysics to simulate an rf mems switch.

They require only a lowvoltage, lowcurrent power supply and have a fully independent parallel logic control interface. Reliability of rf mems capacitive and ohmic switches for. The fabrication of integrated mems device for rf circuits design has a key impact on. Design, analysis and comparison of various mems switches for reconfigurable planar antenna 22 switches are applied on various shapes and geometry of microstrip antennas like planar inverted fshape pifa, eshape, sshape, spiral, fractal and many more to achieve different applications. Rf mems switch integrated on printed circuit board with. For commercialbound rf mems integrated circuits ics, novel solutions have emerged to. Tang abstract radio frequency rf microelectromechanical systems mems have been pursued for more than a decade as a solution of highperformance onchip fixed, tunable and reconfigurable circuits. Microelectromechanical systems mems stand poised for the next major breakthrough in the silicon. Jan 07, 2014 lets take a look at how you can use comsol multiphysics to simulate an rf mems switch. The typical shunt mems switch consists of a thin metal membrane suspended over the center conductor of a cpw coplanar waveguide and fixed at both ends to the ground conductor of the cpw. A brief description of the potential integration of rf mems switches into reconfigurable circuits is also included. Abstract radio frequency rf microelectromechanical. Rf mems devices and their applications in reconfigurable rf.

Mems switches are devices that use mechanical movement to achieve a short circuit or an open circuit in the rf transmission line. This unified treatment of rf mems based circuit technology opens up a new world of solutions for meeting the unique challenges of low powerportable wireless products. Van caekenberge rf mems on the radar, ieee microwave magazine october 2009. Characterization and optimization of bicmosintegrated rf. Rfmems switches for reconfigurable integrated circuits. Modeling, simulation and characterizations of devices and circuits, passive components and circuits, rfmems and moems, sibased devices and ic technologies received 1 march 2011. Rf mems switches and integrated switching circuits.

Rf mems switches and integrated switching circuits vol. Figure 2 from phasechange rf switches with robust switching cycle. A special attention is paid to the rf mems switches. A metalcontact rf mems shunt switch has been developed as a lowloss, wide bandwidth passive component, and recent work has focused on achieving good reliability with low actuation voltages. May 22, 2014 surface micromachining technology is typically used to develop different types of single pole multithrow spmt switches like spst, spdt and sp4t. Rf mems switches and integrated switching circuits builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on rf mems switches and micromachined switching circuits, and presents a unified framework of coverage. Rf mems switches and integrated switching circuits article in journal of semiconductor technology and science 73 september 2007 with 759 reads how we measure reads. Actually, silicon based rf mems are very easy to be micromachined, can be integrated with mature semiconductor technology processes, and have the potential for wide proliferation across the global semiconductor foundry business. Here we present for the first time capacitive mems switch fabrication on an lcp substrate and its characterization and properties up to 40 ghz. Modeling of mems switches and development of rf mems capacitive switches and mems tunable filters saha, shimul chandra on.

A packaged, highlifetime ohmic mems rf switch radant. Rf mems switches and integrated switching circuits mems. Mini circuits is a global leader in the design and manufacturing of rf, if, and microwave components from dc to 86ghz. Rf switches are components used for switching the signal paths of high frequency circuits in wireless communication devices. A low loss rf mems kuband integrated switched filter bank, ieee microwave and. Three reconfigurable circuits are presented in this thesis with rf mems devices. Rf functionality can be implemented using a variety of rf technologies. Rf mems switches, with their low loss, high isolation, high linearity, and low power consumption, will bring significant improvements to rf systems. The resulting relays arent particularly speedy compared to todays transistors. Rf mems switches and integrated switching circuits request pdf. Mems reconfigurable millimeterwave surface for vband. Introduction lowcost mems switches are prime candidates to replace the conventional gaas fet and pin diode. The actuation voltage of the switch was measured to be 1. Zerostatic power radiofrequency switches based on mos2.

An overview of rf mems switches free download as powerpoint presentation. Bakerikassem university of waterloo waterloo, ontario, canada abstract a maskless postprocessing technique for cmos chips is developed that enables the fabrication of rf mems parallelplate capacitors with a high quality factor and a very compact size. In this chapter, electrostatically actuated rfmems switch configurations that can be easily integrated in uniplanar circuits are presented. Rf circuits for aesa using rf mems switches examples phase shifter. Rf mems circuits applications of mems switch and tunable capacitor dr. Novel multiport rf mems rtype switches and their integration in the form of redundancy switch matrices have been also presented. Sp6t, sp8t, and sp10t mechanical and solid state rf switches for 50ohm and 75ohm systems spanning dc to 40 ghz. In this thesis, a fully bicmos embedded rfmems switch for mmwave. Using the ethernet interface the switch matrices can be controlled from any computer with an internet connection, or even your smartphone from almost anywhere.

Better switching characterization and optimization of bicmos integrated rf mems switches the monolithic integration of rf mems into a sigebicmos technology enables the development of costeffective and highly integrated circuits for future radar and imaging systems. It also explores the hotswitching reliability of mems switches using different types of input signals. Mems nems concept audio delonghi group hp agilent keysight, 8720d. Brown, senior member, ieee invited paper abstract this paper deals with a relatively new area of radiofrequency rf technology based on microelectromechanical systems mems. Rf switches and varactors are often combined in arrays and must be integrated with their surrounding control electronics. In this work, building blocks required to control electrostatically actuated radio frequency micro electro mechanical system rf mems matrices were developed and integrated into demonstrator circuits.

Rf mems provides a class of new devices and components which display superior highfrequency performance relative to conventional usually semiconductor. Rf mems switches are already shipping to or poised. Rf switches are an important component used in a majority of these diverse applications requiring a wide variety of design complexity, configurations and performance requirements depending on the needs of each application. Besides rf mems technology, iiiv compound semiconductor gaas, gan, inp, insb, ferrite, ferroelectric. Design, analysis and comparison of various mems switches for. Fortunately, a new option has arrived in the form of the rf microelectromechanicalsystems mems switch. A comparison between rf mems switches and semiconductor switches p.

Rf mems switches are primed for massmarket applications. Denhoff1 1institute for microstructural sciences, national research council, ottawa, canada k1a 0r6 2electrical and computer engineering department, university of waterloo, waterloo, canada, n2l 3g1 dated. Spst, spdt or xpyt or be used in rf circuits phase shifters, filters, typical configuration. A relay thats about the size of a modern cmos device can take anywhere from 1 to 10 nanoseconds to.

Two different rf mems switches have been developed. Highfrequency performance and hotswitching reliability by tai wen jau high frequency design abstract this article describes the sparameter performance of onboard rf mems switches from dc to 4 ghz. You can even synchronize other software with the switching sequence. Rfmems switches for reconfigurable integrated circuits article pdf available in ieee transactions on microwave theory and techniques 4611. Rf switches based on mems technology combine many of the features of electromechanical and solidstate switches. Two mems chips that have a spst single pole single throw contact configuration are installed on the ceramic package using the flip chip bonding method as shown fig. Mems switches with thickfilm multilayer substrates. Types and design styles advanced technologies general terms design, experimentation. Jun 28, 2018 this value is higher or comparable to more mature switching devices, including transistor, mems, and pcm rf switches supplementary tables 1 and 2 4,29,30,31, with the added benefit of area. Selecting electromechanical and solidstate rf switches. In this work, an electromagnetic em model and a smallsignal lumpedelement model of a waferlevel encapsulated wle radio frequency microelectromechanical systems rf mems switch is presented. These results are about 1030 db higher than those of most solidstate devices. Mems, fet and pin rf switching devices and circuits for reconfigurable antennas juraj bartolic university of zagrebcroatia outline semiconductor switching devices basic properties of pin diode and fets in rf switching applications comparison of semiconductor switches mems as rf switches what are mems. The book features exercises and detailed case studies on working rf mems circuits that help you decide what approaches best fit your design constraints.

Inexpensive vhfuhf diode rf switch under switching circuits. Standard engineering practices have been employed in the design and. Hillars amp bti lk2000 amplifier to gs35b n9adg lm324 lm324n quad operational amplifier. Idt continues to build a portfolio of rf switches with industry leading performance to address these evolving needs. Mems reference shelf mems reference shelf editorinchief stephen d.

Mwrf com sites mwrf com files uploads 20 05 21 g f1. Virtually all spacecraft with communications or radiometric systems employ rf switching network configurations and their. These switches are the unambiguous micro mechanical switches that are intended to operate at rf to mm wave frequencies, which mean 0. Rf mems switches and integrated switching circuits a. Pdf rfmems switches for reconfigurable integrated circuits. Cosimulation of the mems devices with the electronics is required to determine overall performance and to ensure that the final product meets design specifications. Solidstate switches with extremely fast switching times. Spdt, dpdt transfer, sp4t, sp6t, sp8t, and sp10t mechanical and solid state rf switches for 50ohm and 75ohm systems spanning dc to 40 ghz. These devices can switch at rf frequencies and tend to have high isolation, i. The prior art includes an rf mems frequency tunable fractal antenna for the 0.

Murata offers various rf switches for devices and functions, such as for modules equipped with individual discrete switch ics and added circuits. The em model of the wle rf mems switch is developed to estimate its rf performance. In this paper we report on recent developments of high power rf mems switches using a matrix or array of switching elements as shown in fig. Mems series and shunt switches are extensively used in spmt rf switches for multiband selectors, filter banks, reconfigurable antennas and phase shifter applications in transmitreceive modules. Presents rf switches and switching circuit mems devices in a unified. Rf mems switches do not currently meet the reliability requirements for this scenario. The substrate file for em simulation is defined in sonnet according to. Interfacial properties of monolayer and bilayer mos 2 contacts with metals. Design, analysis and comparison of various mems switches. Circuit equivalent of rf mems series contact switch.

These holes also reduce the stiffness of the cantilever as well as the squeeze film damping increasing the switching speed of the mems switch. For this reason, they are being developed intensively by corporations worldwide for use in. A radiofrequency microelectromechanical system rfmems is a microelectromechanical system with electronic components comprising moving submillimetersized parts that provide radiofrequency rf functionality. This paper deals with a relatively new area of radiofrequency rf technology based on microelectromechanical systems mems. The book presents the design and fabrication of rf mems switches and switch circuits.

Shi cheng anders rydberg carl samuelsson robert malmqvist. This rf mems switch circuit uses an integrated structure for the dc ground pin9 on the input side and rf ground on the output side. Rf switches renesas rf switching system 19 rackmount rfsw03 elber s. Rf mems switches since the rf mems switch is the key building block for a variety of rf mems based circuits, the first focus was on realizing all kinds of switches shunt or series configuration in different transmission line configurations microstrip and coplanar and for various frequency bands. Milosavljevic abstract an overview of the mems technology development and applications is given in this paper. The fom is a function of a switchs onresistance when it is closed and its offresistance when it is open. To increase the reliability of capacitive rf mems switch significantly, we previously suggested constantchargecc biasing. Request pdf rf mems switches and integrated switching circuits radio frequency rf microelectromechanical systems mems have. They are offered in standard surfacemount space saving lfcsp plastic packages. Table 1 shows the processed file of design1 rf switch. A complete platform for rf switch and varactor design. Laser doppler vibrometry ldv and coherence scanning interferometry. Development of compound semiconductor fet and integrated. A comparison between rf mems switches and semiconductor switches.